Vacuum Microelectronics > 전자재료

Preface ix
List of Contributors xiii
1 Historical Overview 1
1.1 Introduction 1
1.2 Shoulders' Proposal 1
1.3 Groundbreaking Work 2
1.4 Invention of Spindt Cathode 4
1.5 Field Emitter Arrays 5
1.6 New Cathode Materials 6
1.7 Future 7
Dedication 9
References 9
2 Technological Overview 13
2.1 Introduction 13
2.2 Promise and Reality 14
2.3 Case Studies 15
2.4 Outlook 30
References 31
3 Theory of Field Emission 33
3.1 Introduction 33
3.2 One-Dimensional Tunneling Theory: Metals 35
3.3 Emission from Multi-Dimensional Structures 69
3.4 Conclusion 97
Acknowledgments 98
References 98
4 Spindt Field Emitter Arrays 105
4.1 Introduction 105
4.2 A Brief History of the Spindt Cathode 106
4.3 Fabrication Technology 108
4.4 Performance 141
4.5 Applications and Ongoing Developments 179
4.6 Summary 181
Acknowledgments 181
References 182
5 Silicon Field Emitter Arrays 187
5.1 Introduction 187
5.2 Fabrication of Silicon FEAs 190
5.3 Free Electron Theory of Field Emission 199
5.4 Emission Characterization of Silicon FEAs 205
5.5 Local Circuit Elements 224
5.6 Summary 241
Dedication 242
References 242
6 Novel Cold Cathode Materials 247
6.1 Introduction 247
6.2 Diamond Emitters 248
6.3 Carbon Nanotube Emitters 265
6.4 Other Cold Cathodes 274
6.5 Conclusion 280
References 280
7 Field Emission Flat Panel Displays 289
7.1 Introduction 289
7.2 Field Emission Displays 290
7.3 Other Display Technologies 334
7.4 Summary 341
Institutions Involved in FED Commercialization 342
Acknowledgments 343
References 343
8 Cold Cathode Microwave Devices 349
8.1 Introduction 349
8.2 Microwave Amplifiers 350
8.3 Field Emitter Arrays 355
8.4 Characteristics of FEA-Cathode Microwave Tubes 381
8.5 Future Work 385
References 386
Index 393