Microchip Fabrication, 5/Ed > 반도체

Ch. 1 The semiconductor industry 1
Ch. 2 Properties of semiconductor materials and chemicals 25
Ch. 3 Crystal growth and silicon wafer preparation 51
Ch. 4 Overview of wafer fabrication 71
Ch. 5 Contamination control 91
Ch. 6 Productivity and process yields 139
Ch. 7 Oxidation 159
Ch. 8 The ten-step patterning process - surface preparation to exposure 197
Ch. 9 The ten-step patterning process - developing to final inspection 245
Ch. 10 Advanced photolithography processes 283
Ch. 11 Doping 325
Ch. 12 Layer deposition 365
Ch. 13 Metallization 401
Ch. 14 Process and device evaluation 435
Ch. 15 The business of wafer fabrication 481
Ch. 16 Introduction to devices and integrated circuit formation 513
Ch. 17 Introduction to integrated circuits 553
Ch. 18 Packaging 569